논문 국내 국내전문학술지(KCI급) DEPOSITION OF SUPER HYDROPHOBIC A-C:F FILMS BY DIELECTRIC BARRIER DISCHARGE AT ATMOSPHERIC PRESSURE
- 학술지 구분 국내전문학술지(KCI급)
- 게재년월 2011-04
- 저자명 김윤기
- 학술지명 한국표면공학회지
- 발행처명 한국표면공학회
- 발행국가 국내
- 논문언어 한국어
홈페이지논문 초록 (Abstract)
Hydrophobic a-C:F film was coated on polycarbonate film with CF4, C2F6 and HFC (C2F4H2) gas in helium discharge generated by 5~100 kHz AC power supply at atmospheric pressure and room temperature. The hig hest water contact angle of the a-C:F film formed with He/C2F6 mixed ga s is 155o. X-ray photoelectron spectrum showed that there was 40% of C- CF3 bond at the surface of the super hydrophobic film. The contact ang le and deposition rate were decreased with increasing substrate temperature. The contact angle was generally increased with the surface roughness of the film. The contact angle was high when the surface microstructure of the film was fine and sharp at the simil ar roughness and chemical composition of the surface.