논문 해외 국제일반학술지 Optical performance evaluation and aligning method for solid immersion lens assembly with wedge plate lateral shearing interferometer
- 학술지 구분 국제일반학술지
- 게재년월 2007
- 저자명 J. Lee, W. Kim, T. Kim, H. Choi, Y. Yoon, N. Park, and Y. Park
- 학술지명 co-author
- 발행처명 Research Gate
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 7
홈페이지논문 초록 (Abstract)
We present a simple and stable optical performance evaluation and aligning method for a solid immersion lens (SIL) assembly with a wedge plate lateral shearing interferometer (LSI). There are many advantages in the use of the wedge plate LSI compared with a current SIL measurement method using a Twyman-Green interferometer. We designed the thicknesses, wedge angles, materials, and reflectances of the first and second surfaces of the wedge plate to be 1 mm, 0.02°, fused silica and 21, and 30%, respectively. Simulation and experimental results are well matched in quantitative analyses at shear ratios of 10, 40, and 70%. On the basis of simulation results for an aberrated SIL assembly with many misaligned cases, we suggested the use of the aligning process with the wedge plate LSI.