논문 해외 국제전문학술지(SCI급) A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2010
- 저자명 H. Moon, Y. Yoon, W. Kim, N. Park, K. Park, and Young-Pil Park
- 학술지명 Opt. Express
- 발행처명 Optica Publishing Group
- 발행국가 해외
- 논문언어 외국어
홈페이지논문 초록 (Abstract)
We report on the realization of solid immersion lens (SIL)-based near-field (NF) optics with an annular aperture, which is targeted to achieve high optical resolution. A numerical aperture (NA) = 1.84 hemisphere SIL-optics with an annular aperture achieves higher optical resolution than the conventional NA = 2.0 SIL-optics. The designed aperture is fabricated by photo-lithography and dry-etching technique. Experimental verification of the designed optics was performed through beam spot profile measurement under NF imaging conditions. A 15% smaller full-width-at-half-maximum spot diameter is obtained by the aperture. We verified that this method gives an improvement of the resolution in the optical imaging systems requiring higher resolution.