논문 해외 국제전문학술지(SCI급) Assembly and evaluation of a SIL optical head for cover-layered incident NFR without disk contact with the bottom surface of a SIL
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2010
- 저자명 Y. Yoon, C. Min, W. Kim, N. Park, and Y. Park
- 학술지명 Microsyst Technol
- 발행처명 Springer Nature
- 발행국가 해외
- 논문언어 외국어
홈페이지논문 초록 (Abstract)
In the assembly of the solid immersion lens (SIL) optical head for cover-layered incident near-field recordings (NFRs), disk contact with the bottom surface of the SIL has previously been regarded as essential. This is because SIL optical heads are designed to interface with a cover layer. However, SILs can be contaminated and damaged by this contact. We present a new SIL optical head assembly method for cover-layered incident NFRs without disk contact with the bottom surface of the SIL. To achieve this, we added zoom optics to a Twyman–Green interferometer in the measurement beam optical path. Our assembly method eliminates SIL contamination problems and the assembly procedure becomes simple because of removing the disk contact process. In addition, it is not necessary to consider the aberrations induced by disk tilt and cover-layer thickness variation. The SIL optical head assembled by the proposed method has good optical performance satisfying the optical tolerances and the measured wavefront aberration is good agreement with simulations.