논문 해외 국제전문학술지(SCI급) Low-cost fabrication of indium tin oxide (ITO) FETs for sodium detection in electrolytes and human urine
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2021-08
- 저자명 임준묵공동(참여),Kwang Soup Song,Byoung Kuk Jang,Muhammad Naufal Indriatmoko,Da Ae Jo,Hae Shin Cho,Hong Gi Oh,Mahmudah Salwa Gianti
- 학술지명 ELECTRONICS LETTERS
- 발행처명 WILEY
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 8
홈페이지논문 초록 (Abstract)
Here, robust and low-cost sodium sensors based on the ion-sensitive field-effect transistor (ISFET) are fabricated using indium tin oxide (ITO) thin film. The effect of the presence of oxygen during the sputtering of the ITO thin film is characterized on the sensitivity of sodium ion (Na+) detection. A sodium ionophore III membrane is applied on the ITO substrate to fabricate ISFET (ITO-ISFET). The results reveal that the increase in the oxygen gas flow rate (0-1 sccm) with a fixed argon flow rate at 20 sccm during sputtering increased the sensitivity of ITO-ISFET to Na+ from 15.8 to 100.9 mV/decade. In addition, the proper condition with a nearly Nernstian slope is at 0.4 sccm oxygen flow rate. Furthermore, the experimental results reveal that the sensors exhibit a high sensitivity of 58.5 +/- 2.1 mV/decade in a wide range (10(-10) to 10(-1) M). The limit of detection (LOD) of ITO-ISFET is 1.8 nM, which is lower than the minimum allowable Na+ level in the human body and urine. Furthermore, the proposed ITO-ISFET has the capability to detect Na+ in real human patient urine without any dilution process.