논문 해외 국제전문학술지(SCI급) DEPOSITION OF N-TYPE BI2TE3 THIN FILMS ON POLYIMIDE BY USING RF MAGNETRON CO-SPUTTERING METHOD
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2015-10
- 저자명 오민욱
- 학술지명 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- 발행처명 AMER SCIENTIFIC PUBLISHERS
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 8
홈페이지논문 초록 (Abstract)
Bi2Te3 thermoelectric thin films were deposited on the flexible polyinnide substrates by RF magnetron co-sputtering of a Bi and a Te targets. The influence of the substrate temperature and RF powe r on the microstructure, chemical composition, andthe thermoelectric pr operties of the sputtered films was investigated by using scanning elect ron microscopy, X-ray diffraction, energy dispersive X-ray spectros copy, and in-plane resistivity/Seebeck coefficient measurement. It wa s shown that the thermoelectric properties of the films depend sensitiv ely on the BifTe chemical composition ratio and the substrate temperat ure, and the layered structure was clearly observed from the cross secti on of the (00L)-oriented, nearly stoichiometric Bi2Te3 films when the substrate temperature is higher than 250 degrees C. As-deposite d Bi2Te3 films deposited at 300 degrees C show the highest power factor of 0.97 mW/K(2)m and the Seebeck coefficient of - 193 mu V/K at 32 deg rees C, which also have (00L) preferred orientation and the layered st ructure. The durability of the Bi2Te3 films on polyimide against repeat ed bending was also tested by monitoring the film resistance, and it was concluded that the Bi2Te3 films are applicable reliably on the curved surfaces with the radius of curvature larger than 5 mm.