논문
해외
국제전문학술지(SCI급)
Hybrid CO2 laser-polishing process for improving material removal of silicon carbide
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2020-02
- 저자명 김건희
- 학술지명 International Journal of Advanced Manufacturing Technology
- 발행처명 Springer
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 6
논문 초록 (Abstract)
A novel hybrid polishing process, called laser-assisted polishing (LAP), was proposed in this study for improving the material removal rate (MRR) of polishing silicon carbide (SiC) by combining a CO
