논문 해외 국제전문학술지(SCI급) Laser scanning confocal thermoreflectance microscope for the backside thermal imaging of microelectronic devices
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2017-12
- 저자명 김건희
- 학술지명 Sensors (Switzerland)
- 발행처명 MDPI AGPostfachBaselCH-4005
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 8
홈페이지논문 초록 (Abstract)
In this paper, we report on a confocal thermoreflectance imaging system that can examine the thermal characteristics of microelectronic devices by penetrating the backside of a device through the substrate. In this system, the local reflectivity variations due to heat generation in the device are measured point by point by a laser scanning confocal microscope capable of eliminating out-of-focus reflections and the thermoreflectance is extracted via Fourier-domain signal processing. In comparison to the conventional widefield thermoreflectance microscope, the proposed laser scanning confocal thermoreflectance microscope improves the thermoreflectance sensitivity by ~23 times and the spatial resolution by ~25% in backside thermoreflectance measurements.