논문 해외 국제전문학술지(SCI급) Quantitative temperature measurement of multilayered semiconductor devices using spectroscopic thermoreflectance microscopy
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2016-06
- 저자명 김건희
- 학술지명 Optics Express
- 발행처명 OSA - The Optical Societyinfo@osa.org
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 5
홈페이지논문 초록 (Abstract)
Thermoreflectance microscopy is essential in understanding the unpredictable local heating generation that occurs during microelectronic device operation. However, temperature measurements of multi-layered semiconductor devices represent a challenge because the thermoreflectance coefficient is quite small and is dramatically changed by the optical interference inside transparent layers of the device. Therefore, we propose a spectroscopic thermoreflectance microscopy system using a systematic approach for improving the quantitative temperature measurement of multilayered semiconductor devices. We demonstrate the quantitative measurement of the temperature profile for physical defects on thin-film polycrystalline silicon resistors via thermoreflectance coefficient calibration and effective coefficient κ estimation.