논문 해외 국제전문학술지(SCI급) Evolutionary grinding model for nanometric control of surface roughness for aspheric optical surfaces
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2008-03
- 저자명 김건희
- 학술지명 Optics Express
- 발행처명 Optical Society of America
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 6
홈페이지논문 초록 (Abstract)
A new evolutionary grinding process model has been developed for nanometric control of material removal from an aspheric surface of Zerodur substrate. The model incorporates novel control features such as i) a growing database; ii) an evolving, multi-variable regression equation; and iii) an adaptive correction factor for target surface roughness (Ra) for the next machine run. This process model demonstrated a unique evolutionary controllability of machining performance resulting in the final grinding accuracy (i.e. averaged difference between target and measured surface roughness) of -0.2??2.3(??) nm Ra over seven trial machine runs for the target surface roughness ranging from 115 nm to 64 nm Ra. ?? 2008 Optical Society of America.