연구홍보포털

논문 초록 (Abstract)

We propose a nanofabrication process to generate large-area arrays of noble metal nanoparticles on glass substrates via nanoimprinting and dewetting of metallic thin films. Glass templates were made via patt ern transfer from a topographic Si mold to aninorganically cross-linked sol-gel (IGSG) resist on glass using a two-layer polydimethylsiloxan e (PDMS) stamp followed by annealing, which turned the imprinted resis t into pure silica. The transparent, topographic glass successfully templatedthe assembly of Au and Ag nanoparticle arrays via thin- film deposition and dewetting at elevated temperatures. The microstruc tural and mechanical characteristics that developed during the processe s were discussed. The results are promising for low-cost mass fabricatio n of devices for several photonic applications.