논문 해외 국제전문학술지(SCI급) Volatile gas sensing properties of phase and composition gradient SnOx thin films by combinatorial sputter deposition
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2012-11
- 저자명 Jin Chul Joo, Hosang Ahn, Hyejin Park, Dong-Joo Kim
- 학술지명 ECS Solid State Letters
- 발행처명 IOP Publishing
- 발행국가 해외
- 논문언어 외국어
- 연구분야 공학 > 환경공학
- 원문 링크 10.1149/2.001302ssl
홈페이지논문 초록 (Abstract)
Compositionally gradient tin oxide thin films were prepared by co-sputtering from tin and tin oxides targets. After annealing at 450 C, gradient crystalline phases of SnO and SnO 2 were fabricated on a single sensor. Acetone, ethanol, and ethylene were utilized to investigate sensing properties of the gradient tin oxide sensor. Coexisting p-type SnO and n-type SnO 2 affect the direction of electrical resistance and the response during gas reaction and recovery. Construction of gradient tin oxide film in terms of composition and crystalline phase demonstrates the design of a gas sensor for the selective gas detection via the combinatorial approach.