논문 해외 국제전문학술지(SCI급) Adhesion-Increased Carbon Nanowalls for the Electrodes of Energy Storage Systems
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2019-12
- 저자명 최원석,최혁주,권석훈,강현일,김정현
- 학술지명 ENERGIES
- 발행처명 MDPI
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 5
홈페이지논문 초록 (Abstract)
Carbon nanowalls (CNWs), which are used as electrodes for secondary batteries in energy storage systems (ESSs), have the widest reaction surface area among the carbon-based nanomaterials, but their application is rare due to their low adhesion with substrates. Indium tin oxide (ITO), a representative transparent conducting oxide (TCO) material, is widely used as the electrode for displays, solar cells, etc. Titanium nitride (TiN) is a well-used material as an interlayer for improving the adhesion between two materials. In this study, ITO or TiN thin films were used as an interlayer to improve the adhesion between a CNW and a substrate. The interlayer was deposited on the substrate using a radio frequency (RF) magnetron sputtering system with a four-inch TiN or ITO target. CNWs were grown on the interlayer-coated substrate using a microwave-plasma-enhanced chemical vapor deposition (MPECVD) system with a mixture of methane (CH4) and hydrogen (H-2) gases. The adhesion of the CNW/interlayer/substrate structure was observed through ultrasonic cleaning.