논문 해외 국제전문학술지(SCI급) Development of a wide-width raster scanning optical system for high-resolution ultraviolet laser direct micro-patterning
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2020-11
- 저자명 JongBok Park, Hyun Choi, Geon Lim, Dong-Kil Lee, No-Cheol Park*, Wan-Chin Kim**
- 학술지명 OPTICS AND LASERS IN ENGINEERING
- 발행처명 ELSEVIER SCI LTD
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 6
홈페이지논문 초록 (Abstract)
We developed F-theta raster scanning optics for high-resolution ultraviolet (UV) beam direct micro-patterning, capable of machining on a 300-mm wide image with a confined beam spot of less than 20 mu m, a 13.5% spot size. To achieve the imaging performance with resolution, F-theta optics based on synthetic silica glass were designed using a high-power laser light source with a wavelength of 355 nm. In addition, to improve the difficulty of optical alignment in conventional systems and the scan linearity between the scan angle and exposing position, F-theta scanning optics were designed to contain two lenses with a rotationally asymmetric high-order polynomial surface. The designed optical system showed a performance of 20 +/- 2 mu m at the full width of a 1/e(2) maximum intensity value through a 0.8 mm focal depth. The scanning linearity error and root-mean-square (RMS) wavefront error were designed to be less than 0.2% and 0.05 lambda, respectively. The design performance was verified using optical characteristic measurements and actual patterning experiments with the optics composed of proto lenses