논문 해외 국제전문학술지(SCI급) Design, fabrication, and testing of MEMS solid propellant thruster array chip on glass wafer
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2009-11
- 저자명 Jongkwang Lee, Kyunghwan Kim, Sejin Kwon
- 학술지명 ELSEVIER
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 3
- 연구분야 공학 > 항공우주공학
홈페이지첨부 파일
논문 초록 (Abstract)
This paper presents the internal ballistic design, fabrication procedure, and performance evaluation of a micro-electro mechanical systems (MEMS) solid propellant thruster array chip. The internal ballistic design was carried out to predict the performance of the thruster. Two different ignition models were used. The numerical results gave a maximum thrust of 3840 mN, and a total impulse of 0.42 mNs at the local ignition model. A photosensitive glass wafer only was used as the bare material for the thruster. The stability of the micro-igniter was improved by using a glass membrane with a thickness of tens of microns. The average thickness of the membrane was 35 m. The proposed micro-igniter had a level of power consumption appropriate to ignite the solid propellant. The thermal, electrical, and mechanical characteristics of the fabricated micro-igniter were measured. The solid propellant was loaded into the propellant chamber without resort to a special technique due to the high structural stability of the glass membrane. AnMEMS solid propellant thruster (MSPT) array was fabricated through anisotropic etching of photosensitive glass. An ignition control system was developed to control the ignition sequence. Ignition and combustion tests of the fully assembly MEMS thruster were performed successfully. The minimum ignition delay was 27.5 ms with an ignition energy of 19.3 mJ. The average of the measured maximum thrust and total impulse were 3619 mN and 0.381 mNs, respectively