논문 해외 국제전문학술지(SCI급) The Effect of Reactive Sputtering on the Microstructure of Parylene-C
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2022-07
- 저자명 Akeem Raji, Ye-Seoul Lee, Seung-Yo Baek, Ji-Hyeon Yoon, Akpeko Gasonoo, Jonghee Lee, and Jae-Hyun Lee
- 학술지명 Materials
- 발행처명 MDPI
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 7
홈페이지논문 초록 (Abstract)
settingsOrder Article Reprints Open AccessArticle The Effect of Reactive Sputtering on the Microstructure of Parylene-C by Akeem Raji 1ORCID,Ye-Seul Lee 1,Seung-Yo Baek 1,Ji-Hyeon Yoon 1,Akpeko Gasonoo 2,†,Jonghee Lee 1 andJae-Hyun Lee 1,*ORCID 1 Department of Creative Convergence Engineering, Hanbat National University, 125 Dongseo-daero, Yuseong-gu, Daejeon 34158, Korea 2 Research Institute of Printed Electronics & 3D Printing, Hanbat National University, 125 Dongseo-daero, Yuseong-gu, Daejeon 34158, Korea * Author to whom correspondence should be addressed. † Current address: Department of Chemistry, University of Calgary, 2500 University Drive N.W., Calgary, AB T2N 1N4, Canada. Materials 2022, 15(15), 5203; https://doi.org/10.3390/ma15155203 Received: 26 June 2022 / Revised: 15 July 2022 / Accepted: 23 July 2022 / Published: 27 July 2022 (This article belongs to the Special Issue Organic Materials for Electronic and Optoelectronic Applications) Download Browse Figures Versions Notes Abstract Sputtering technique involves the use of plasma that locally heats surfaces of substrates during the deposition of atoms or molecules. This modifies the microstructure by increasing crystallinity and the adhesive properties of the substrate. In this study, the effect of sputtering on the microstructure of parylene-C was investigated in an aluminum nitride (AlN)-rich plasma environment. The sputtering process was carried out for 30, 45, 90 and 120 min on a 5 μm thick parylene-C film. Topography and morphology analyses were conducted on the parylene-C/AlN bilayers. Based on the experimental data, the results showed that the crystallinity of parylene-C/AlN bilayers was increased after 30 min of sputtering and remained saturated for 120 min. A scratch-resistance test conducted on the bilayers depicted that a higher force is required to delaminate the bilayers on top of the substrate. Thus, the adhesion properties of parylene-C/AlN bilayers were improved on glass substrate by about 17% during the variation of sputtering time.